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It is created ion or radical to have high reaction nature by accelerated electron when Ar, H2, O2 etc gas
molecular in chamber of low vacuum status is subjected to sufficient energy.
These ions and radicals accelerated by continual collision, electric attraction induce physical/chemical
change by striking surface of materials to break down its molecular integrity within several Å range
which peel off micro-oil layer on surface and create micro-rough/functional group of gas ingredient in
order to prevent inferiority painting in plastic industry and enhance adhesion strength/coating strength.
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 Applications : BGA, Chip Packing(Surface Cleaning),
Removal of Organism/Moisture, /Fine materials
Chambe Size ; 700 X 630 X 500
Size of treated substance ; 20~30 BGA/Magazine
Q?y of treated substance ; 16 Magazine per cycle
Process time ; 3~5 min
Power ; High frequency Pulse
Loading Type ; Munual (Auto loading-Option)
Process control ; Touch Screen
Gas ; Ar, O2
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Applications ; Semiconductor Packaging
(Wire bonding, Die attach, EMC molding, Printing on chip surface)
Chambe Size ; 700 X 600 X 500
Q?y of treated substance ; 16 Magazines per cycle or 12 Trays
Process time ; 3~8 min
Power ; High frequency Pulse
Loading Type ; Munual
Process control ; Touch Screen
Gas ; Ar, O2, H2
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